ULTRA THIN FILMS, COATINGS AND PLASMA TREATMENTSUltra thin films create very conformal coatings for MEMS. These are increasingly used in a wide variety of MEMS and nanodevices to deliver specific surface properties and lifetime reliability.
The SPD™ process module from memsstar® offers a wide range of standard film processes including moisture barriers, wetting layers, anti-stiction coatings, seed layers, bio-active or bio-inert surfaces and many others.
 Traditional liquid immersion, or stagnant gas vapour phase systems can be limited by poor process control, slow process times, and coverage of aggressive feature shapes. memsstar® uses unique CCFT™, and ultra thin films are quickly and repeatably deposited for optimised device properties using an integrated high power plasma chemistry.
Another unique capability is that this Surface Modification can be done immediately after the release etching process. memsstar® enables the MEMS surfaces to be treated whilst in pristine condition, which is as soon as they have been etched and without breaking process vacuum. This delivers superior film characteristics, in terms of durability and coverage.
memsstar® processes are the ideal solution for advanced surface engineering, and deliver reliable cost effective processing.
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Surface Modification - white paper Surface Activation Using Remote Plasma for Hydrophilic Bonding at Elevated Temperature , R.Belford and S.Sood
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