OVERVIEWmemsstar® is a product family for MEMS processing, based on proprietary IP.
Process Modules - or PM's - use gas phase chemistries to achieve sample scale and wafer scale dry processing in single wafer vacuum chambers.
Using our unique CCFT™ technology, memsstar® is used for Release Etch processing, and Surface Modification with coatings and remote plasma chemistries.
  
|
Conference Paper System for MEMS Manufacturing,Semicon, Dr A.O'Hara
Marketing Brochure The need for MEMS process integration
|
