OVERVIEWmemsstar® is a product family for MEMS processing, based on proprietary IP.
Process Modules - or PM's - use gas phase chemistries to achieve sample scale and wafer scale dry processing in single wafer vacuum chambers.

Using our unique CCFT™ technology, memsstar® is used for Release Etch processing, and Surface Modification with coatings and remote plasma chemistries.
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Conference Paper System for MEMS Manufacturing,Semicon, Dr A.O'Hara
Marketing Brochure The need for MEMS process integration
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