SURFACE MODIFICATION FOR MEMS, USING ULTRA THIN FILMS AND PLASMA CHEMISTRIESCompared to bulk liquid or stagnant gas methods, SPD films offer much better performance including;
- faster process times , wide process window
- more robust films, low material usage
- stacked films, multiple chemistries
 
In partnership with SAFC Hitech, a full range of high quality films are available and ready to use.
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SPD™ Hydrophobic
- SPD™ Hydrophilic
- SPD™ Bio Active
- SPD™ Bio Inert
- SPD™ Seed Layer
- SPD™ Customer Process - Full development capability - we work with our customers on their specific proprietary applications.
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Marketing Brochure An overview of surface modification using memsstar
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