MODULES AND PLATFORMSWe offer reliable and cost effective process modules on a range of platforms which can be easily upgraded. These systems are based on proven hardware and software, and are aimed to meet the technology needs of labs and fabs.
Etch - SVR - Sacrificial Vapour Release
Coatings - SPD - Surface Prep' and Dep'
Platforms - Solo, Sentry, or Multi |
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