MEMS IS A GROWING MARKET WHICH NEEDS NEW TECHNOLOGY;

Etch , isotropic chemical etching to remove a sacrificial materials

Oxides - doped, undoped, PECVD, thermal

Silicon - poly, amorphous, single crystal

Transition Metals - such as Ti, Ta, Mo, W, and others

Surface Modification

Wetting Layers, Moisture Barriers

Anti Stiction coatings

Seed Layers, Stacked Films

Bio Active, Bio Inert