MEMSSTAR® SHIPS FIRST SYSTEM TO CHINA

01.10.2009

 The Sacrificial Vapour Release (SVR) system has been purchased by Zhejiang Dali Technology of Hangzhou to develop and manufacture advanced sensors for their range of thermal imaging systems.

“The market for MEMS devices is growing steadily as designers develop new and interesting applications for the technology aided by advanced manufacturing platforms,” commented Tony McKie, memsstar® general manager.  “In China in particular we have witnessed MEMS devices being integrated into more varied industrial applications, such as Dali-Tech’s, as well as the traditional consumer market applications.”

The memsstar® platform purchased by Dali-Tech incorporates SVR technology, which utilises dry etch gasses to deliver high etch rates and superb selectivities to prevent damage to both the mechanical and underlying surfaces.  The memsstar® platforms have been uniquely designed to integrate across multiple materials and designs allowing MEMS developers and manufacturers to create a process optimised for their specific devices.

“After evaluation and demonstration, we have selected the memsstar® SVR system and believe that it is a good fit to our MEMS fabrication,” stated Dr Lijun Jiang, director of the microelectronic research centre for DALI Tech.  “The releasing step is critical in designing a MEMS device, it determines the selection of the material stacks you will be using and the overall process flow. The SVR system has provided a platform for us to use CMOS-compatible materials and technology in our device prototyping. memsstar®  is a relatively young company however, its employees are all CMOS and MEMS veterans. Dali Tech is the first customer in China, and we have been extremely satisfied with their business service.”

About Dali Technology

Zhejiang DALI technology Co Ltd, established in 1984, is a hi-tech enterprise that transformed from the Zhejiang Testing Technology Institute and incorporated with Zhejiang Daily Newspaper Group and Zhejiang Investment Co., Ltd. Through 20 years of creativity and innovation DALI has become one of the largest-scale comprehensive manufacturers of thermal imaging cameras and digital video recording equipment. DALI also became the first listed enterprise in the IR cameras and security industries in China.  The company stock successfully went public at Shenzhen stock exchange on Feb 18th, 2008. (Stock code: 002214).

About Point 35 Microstructures

Point 35 Microstructures was founded in 2003 to develop new technology for MEMS applications and to supply first class full specification semiconductor manufacturing process equipment and services. 

In 2004 Point 35 Microstructures introduced the proprietary memsstar® brand of MEMS manufacturing systems based on new wholly owned IP and created its memsstar® business division.  The MEMS process tools and in-house process integration expertise enables customers to make the successful transition to integrated dry processing and from R&D to high yield manufacturing of MEMS devices.

In 2006 the company was named as the Most Innovative Company by the National Microelectronics Institute. 

For further information please contact: Tony McKie, general manager, memsstar®, Starlaw Park,

Tel: +44 (0) 1506 409160; Email: info@memsstar.com; Web: www.pt35.com or www.memsstar.com