OLIGON QUALIFIES MEMSSTAR® FOR ADVANCED RELEASE ETCHING ON LATEST MEMS MEMBRANES02.01.2007 October 2006
Oligon Ltd has qualified memsstar® release etch systems on it’s latest MEMS devices, to enable more cost effective and efficient manufacturing processing.
Mark Hesketh , COO of Oligon Ltd, “At Oligon we have established a proprietary process which allows the fabrication of MEMS based transducers using CMOS compatible processes and materials to deliver Active IC s ™. Integration of the MEMS based transducers and CMOS processing electronics allows industry benchmark size and cost to be achieved for many high volume low cost sectors such as mobile phones and computing. We have used memsstar® release etch systems on our membrane structures and seen significant reduction of etch time from several hours to several minutes, with excellent removal characteristics and etch selectivity. The benefits to us of reduced manufacturing times, increased throughput and significant cost savings are obvious . The process controls available on the memsstar® equipment allow us to establish a process platform from which integrated devices can be scaled to mass production rapidly and cost effectively
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