MEMSSTAR® LAUNCH SVR AND SPD MODULES AT SEMICON EUROPA04.04.2006 Making an industry debut at Semicon Europa in Munich, Germany, memsstar® launched the first two process modules of it's new product range.
The SVR module is a silicon etch process which is completely dry and has very high selectivity to other materials on a device.
The SPD module is an deposition process using precursor and plasma chemistries for advanced surface engineering and coatings.
"We are delighted at the high amount of strong interest in our proprietary technology", said Sales Director Tony McKie. " Already our customers are enjoying the benefits of highly controlled vapour phase processing"
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