WELCOME TO MEMSSTAR TECHNOLOGY

LEADING TECHNOLOGY PROCESSING FOR MEMS

memsstar®  delivers leading performance for;

Dry Isotropic Etching  VHF and XeF2 tools

Surface Modification - robust, ultra thin coatings tools

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FEATURED CONTENT

Surface Treatment

Surface Treatment encompasses some distinct surface engineering steps ...

Release

In MEMS processing the Release process is etched removal of the Sacrificial Materials ...

Platforms

Any of the Memsstar modules are available in 3 configurations... ...